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Monitoring Solutions for Semiconductor Subfabs

A semiconductor transistor is a part with specific electronic properties that allow it to serve as a component in microchips and modern electronics like phones, laptops, and more. As these components are small and require precise manufacturing methods, there are facilities dedicated to their manufacture. 

These facilities consist of several levels including air handlers and scrubbers for exhaust, HEPA room, fab cleanroom, and subfab areas. The control of pressure, flow, and temperature within the facility is essential. 

Semiconductor subfabs are located directly below the cleanroom. Here you will find an array of ancillary equipment, such as vacuum pumps, abatement systems, chillers, gas cabinets, and other equipment to keep process tools functioning efficiently. The equipment within the subfab is interconnected with the tools found within the fab cleanroom itself; these separate but connected areas work together to make sure the facility runs smoothly.  Continue reading “Monitoring Solutions for Semiconductor Subfabs”

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Monitoring Solutions for Semiconductor HEPA/ULPA Rooms

Semiconductor Fab with HEPA/ULPA Room Highlighted

A semiconductor transistor is a part with specific electronic properties that allow it to serve as a component in microchips and modern electronics like phones, laptops, and more. As these components are small and require precise manufacturing methods, there are facilities dedicated to their manufacture.

These facilities consist of several levels including air handlers and scrubbers for exhaust, HEPA room, fab cleanroom, and subfab areas. The control of differential pressure within the facility is essential for the safety of both equipment and personnel.

Semiconductor Fab with HEPA/ULPA Room Highlighted
Semiconductor Fab HEPA/ULPA Room

The HEPA/ULPA rooms are found in the space above a semiconductor cleanroom. This area has filtration equipment that removes particulates from the outside environment. A HEPA (high efficiency particulate air) filter and/or an ULPA (ultra low particulate air) filter is used to trap small contaminants and prevent them from entering the fab cleanroom area. The fab cleanroom has to be free of particulates, as it is where semiconductor devices such as microscopic transistors are manufactured. Something as small as a molecule from a fragrance can destroy one of these transistors, making proper filtration an essential part of the semiconductor fabrication process.  Continue reading “Monitoring Solutions for Semiconductor HEPA/ULPA Rooms”

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Differential Pressure Switch/Gage within Semiconductor Fabs

semiconductor facility building outside

In simple terms, a semiconductor transistor is a part with specific electronic properties that allow it to serve as a component in microchips and modern electronics like phones, laptops, and more. As these components are small and require precise manufacturing methods, there are facilities dedicated to their manufacture.

These facilities consist of several levels including air handlers and scrubbers for exhaust, HEPA room, fab cleanroom, and subfab areas. The control of differential pressure within the facility is essential for the safety of both equipment and personnel. Continue reading “Differential Pressure Switch/Gage within Semiconductor Fabs”

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What are Room Pressure and Room Status Monitors?

Differential pressure between two rooms prevents dust, particulates, and pathogens from entering or exiting one room and going into the other. Depending on the relationship between rooms, one room will be under positive pressure when referenced against the other. This positive-negative pressure relationship between two spaces is the main idea behind clean rooms and isolation rooms. To ensure the differential pressure relationship is maintained, a measuring device must be used.

Magnehelic® Gages Monitoring Isolation Room Pressure

Room pressure monitors and room status monitors measure, display, and transmit the differential pressure reading between two rooms. In general, room pressure monitors only monitor differential pressure. On the other hand, room status monitors monitor differential pressure and additional parameters such as relative humidity, temperature, air change, or door status. They are both used in critical applications that require critical low differential pressure relationships.  Continue reading “What are Room Pressure and Room Status Monitors?”

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What are Room Pressure and Room Status Monitors?

Differential pressure between two rooms prevents dust, particulates, and pathogens from entering or exiting one room and going into the other. Depending on the relationship between rooms, one room will be under positive pressure when referenced against the other. This positive-negative pressure relationship between two spaces is the main idea behind clean rooms and isolation rooms. To ensure the differential pressure relationship is maintained, a measuring device must be used.

Magnehelic® Gages Monitoring Isolation Room Pressure

Room pressure monitors and room status monitors measure, display, and transmit the differential pressure reading between two rooms. In general, room pressure monitors only monitor differential pressure. On the other hand, room status monitors monitor differential pressure and additional parameters such as relative humidity, temperature, air change, or door status. They are both used in critical applications that require critical low differential pressure relationships.  Continue reading “What are Room Pressure and Room Status Monitors?”